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| 15kv | 20kv | 30kv | semi-hipressure | hipressure |
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dn40cf mounting flange |
dn40cf mounting flange |
dn40cf mounting flange |
add-on for 15/20/30 reg
rheed guns
|
add-on for 15/20/30 reg
rheed guns
|
|
340 µa max current (up to 1ma on request) |
250 µa max current (up to 1ma on request) |
170 µa max current (up to 1ma on request) |
dn40cf mounting flange |
dn40cf mounting flange |
|
242 mm length |
242 mm length |
318 mm length |
factor 1000 pressure reduction |
factor 200.000 pressure reduction |
|
up to 15 kv energy |
up to 20 kv energy |
up to 30 kv energy |
beam alignment aperture |
beam alignment aperture |
| more info | more info | more info | more info | more info |
rheed system 15 kv - reg15
technical data:
|
energy range |
7-15 kv |
|
max. current |
340 µa (up to 1ma on request) |
|
beam spot size |
<70 µm |
|
focus lens |
electrostatic |
|
deflection |
magnetic x-y beam rocking beam blanking |
|
mounting flange |
dn40cf |
|
bakeout temp. |
200°c |
|
dimensions |
length 242 mm |
rheed system 20 kv - reg20
technical data:
|
energy range |
7-20kv |
|
max. current |
250 µa (up to 1ma on request) |
|
beam spot size |
<70 µm |
|
focus lens |
electrostatic |
|
deflection |
magnetic x-y beam rocking beam blanking |
|
mounting flange |
dn40cf |
|
bakeout temp. |
200°c |
|
dimensions |
length 242 mm |
rheed system 30 kv - reg30
technical data:
|
energy range |
10-30kv |
|
max. current |
170 µa (up to 1ma on request) |
|
beam spot size |
<70 µm |
|
focus lens |
electrostatic |
|
deflection |
magnetic x-y beam rocking beam blanking |
|
mounting flange |
dn40cf |
|
bakeout temp. |
200°c |
|
dimensions |
length 318 mm |
semi-hipressure add-on for 15/20/30 reg rheed guns
technical data:
|
pressure reduction through single differential pumping |
factor 1000 |
|
stable emission with add-on at chamber pressure |
1x10-4 mbar |
|
beam alignment through aperture in phosphor coated disk |
|
|
deflection |
magnetic x-y beam rocking |
|
mounting flange |
dn40cf |
|
bakeout temp. |
200°c |
|
dimensions (total length of add-on including gate valve) |
335 mm |
hipressure add-on for 15/20/30 reg rheed guns
technical data:
|
pressure reduction through dual differential pumping |
factor 200.000 |
|
stable emission with add-on at chamber pressure |
5x10-2 mbar |
|
beam alignment through aperture in phosphor coated disk |
|
|
deflection |
magnetic x-y beam rocking |
|
mounting flange |
dn40cf |
|
bakeout temp. |
200°c |
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