| 15kv | 20kv | 30kv | semi-hipressure | hipressure |
 |  |  |  |  |
| dn40cf mounting flange | dn40cf mounting flange | dn40cf mounting flange | add-on for 15/20/30 reg rheed guns | add-on for 15/20/30 reg rheed guns |
| 340 µa max current (up to 1ma on request) | 250 µa max current (up to 1ma on request) | 170 µa max current (up to 1ma on request) | dn40cf mounting flange | dn40cf mounting flange |
| 242 mm length |  242 mm length | 318 mm length | factor 1000 pressure reduction | factor 200.000 pressure reduction |
| up to 15 kv energy | up to 20 kv energy | up to 30 kv energy | beam alignment aperture | beam alignment aperture |
technical data:
| energy range | 7-15 kv |
| max. current | 340 µa (up to 1ma on request) |
| beam spot size | <70 µm |
| focus lens | electrostatic |
| deflection | magnetic x-y beam rocking beam blanking |
| mounting flange | dn40cf |
| bakeout temp. | 200°c |
| dimensions | length 242 mm |
technical data:
| energy range | 7-20kv |
| max. current | 250 µa (up to 1ma on request) |
| beam spot size | <70 µm |
| focus lens | electrostatic |
| deflection | magnetic x-y beam rocking beam blanking |
| mounting flange | dn40cf |
| bakeout temp. | 200°c |
| dimensions | length 242 mm |
technical data:
| energy range | 10-30kv |
| max. current | 170 µa (up to 1ma on request) |
| beam spot size | <70 µm |
| focus lens | electrostatic |
| deflection | magnetic x-y beam rocking beam blanking |
| mounting flange | dn40cf |
| bakeout temp. | 200°c |
| dimensions | length 318 mm |
technical data:
| pressure reduction through single differential pumping | factor 1000 |
| stable emission with add-on at chamber pressure | 1x10-4 mbar |
| beam alignment through aperture in phosphor coated disk | |
| deflection | magnetic x-y beam rocking |
| mounting flange | dn40cf |
| bakeout temp. | 200°c |
| dimensions (total length of add-on including gate valve) | 335 mm |
technical data:
| pressure reduction through dual differential pumping | factor 200.000 |
| stable emission with add-on at chamber pressure | 5x10-2 mbar |
| beam alignment through aperture in phosphor coated disk | |
| deflection | magnetic x-y beam rocking |
| mounting flange | dn40cf |
| bakeout temp. | 200°c |
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